Ti<sub>2</sub>AlN薄膜的制备及性能表征

Ti₂AlN薄膜的制备及性能表征

刘可心, 王蕾, 刘佳磊, 金松哲

Preparation and Characterization of Ti₂AlN Films

LIU Kexin, WANG Lei, LIU Jialei, JIN Songzhe

机械工程学报 . 2019, (16): 77 -84 . DOI: 10.3901/JME.2019.16.077