压电力传感器晶片与电极接触刚度影响研究<sup>*</sup>

金雷, 贾振元, 刘巍

Effect of Contact Stiffness between Sheets and Electrodes in Piezoelectric Force Sensors

JIN Lei, JIA Zhenyuan, LIU Wei

机械工程学报 . 2016, (22): 15 -23 . DOI: 10.3901/JME.2016.22.015