超声空化辅助金刚石线锯切割单晶硅机理分析与试验验证

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机械工程学报 ›› 2024, Vol. 60 ›› Issue (9) : 114-126. DOI: 10.3901/JME.2024.09.114

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Mechanism Analysis and Experimental Verification of Ultrasonic Cavitation Assisted Diamond Wire Saw Cutting Monocrystalline Silicon

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{{article.zuoZheCn_L}}. {{article.title_cn}}[J]. {{journal.qiKanMingCheng_CN}}, 2024, 60(9): 114-126 https://doi.org/10.3901/JME.2024.09.114

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 60(9): 114-126 https://doi.org/10.3901/JME.2024.09.114

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