氢气流量对大面积金刚石膜沉积的影响

doi:10.11933/j.issn.1007-9289.20171018002

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中国表面工程 ›› 2018, Vol. 31 ›› Issue (2) : 75-84. DOI: 10.11933/j.issn.1007-9289.20171018002

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表面工程

氢气流量对大面积金刚石膜沉积的影响

孙祁,汪建华,刘繁,翁俊

作者信息 +

Effects of Hydrogen Flow Rate on Deposition of Large Area Diamond Films

SUN Qi, WANG Jian-hua, LIU Fan and WENG Jun

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摘要

为了实现大面积金刚石膜的高速均匀沉积，在新型多模微波等离子体装置中，利用微波等离子体（Microwave plasma chemical vapor deposition，MPCVD）技术，对大面积金刚石膜沉积过程中气体流场、电子密度和温度、基团分布及金刚石膜质量进行研究。流场模拟结果表明，多模MPCVD装置在高气体流量下依旧保持良好的流场稳定性。等离子体光谱结果表明，随着氢气流量的上升活性基团的强度上升。氢气流量在400 cm³/min以内时，活性基团可在基底表面对称均匀分布。电子密度和电子温度随着氢气流量的上升先上升后下降，在500 cm³/min达到最大，分别为2.3×10¹⁹/m³和1.65 eV。在氢气流量为300 cm³/min时可在直径为100 mm的钼基底上实现大面积金刚石膜的均匀沉积，金刚石膜中心和边缘处拉曼光谱FWHM值为4.39 cm^-1和4.51 cm^-1，生长速率为5.8 μm/h。

Abstract

In order to achieve the uniform deposition of large area diamond films with the high growth rate, the gas flow field, electron density, electron temperature, the species distribution and the quality of the diamond film were investigated by the microwave plasma chemical vapor deposition (MPCVD) method in a novel self-built overmoded MPCVD device. The gas flow field results indicate that the overmoded MPCVD presents good stability of the gas flow field even at a high gas flow rate. The optical emission spectroscopy (OES) results indicate that the intensities of all chemical radicals increase with the increase of the hydrogen flow rate. The chemical radicals can be systematically distributed along the substrate surface when the gas flow rate is within 400 cm³/min. The electron density and electron temperature first increase and then slightly decrease when the gas flow rate keeps increasing. The maximum values of the electron density and electron temperature are 2.3×10¹⁹/m³ and 1.65 eV, respectively, when the hydrogen flow rate is 500 cm³/min. The uniform diamond film is deposited on the molybdenum plate of 100 mm diameter when the hydrogen flow rate is 300 cm³/min. The FWHM value is 4.39 cm^-1 and 4.51 cm^-1 for the center and verge place of the diamond film, respectively, and the growth rate is 5.8 μm/h.

导出引用

孙祁,汪建华,刘繁,翁俊. 氢气流量对大面积金刚石膜沉积的影响[J]. 中国表面工程, 2018, 31(2): 75-84 https://doi.org/10.11933/j.issn.1007-9289.20171018002

SUN Qi, WANG Jian-hua, LIU Fan and WENG Jun. Effects of Hydrogen Flow Rate on Deposition of Large Area Diamond Films[J]. China Surface Engineering, 2018, 31(2): 75-84 https://doi.org/10.11933/j.issn.1007-9289.20171018002

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