面向超洁净流控的基于磁性薄膜标记柔性隔膜变形场重构方法研究
刘龙胤, 潘慎逸, 陈垚岗, 申慧敏
Reconstruction Method of Deformation Field of Flexible Diaphragm Based on Magnetic Film Labeling for Ultra-clean Flow Control
LIU Longyin, PAN Shenyi, CHEN Yaogang, SHEN Huimin
液压与气动
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2024, (11): 94
-100
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DOI: 10.11832/j.issn.1000-4858.2024.11.011
