The Frequency Trimming Research on Uncoated Micro-hemispherical Resonantor Using Ion Beam
LI Jiacheng, LU Kun, XI Xiang, SHI Yan, SUN Jiangkun, WU Xuezhong, XIAO Dingbang
Journal of Mechanical Engineering . 2026, (5): 319 -328 .  DOI: 10.3901/JME.260248