For traditional compliant joints, such as notch joints and leaf springs, the deformations are quite limited. To overcome those shortcomings, periodically corrugated flexible (CF) beam is applied to design compliant joints on 2-DOF precise positioning stage which is driven by electromagnetic actuators. Based on the features of these three positioning stages, the models of finite element analysis are established, and the static and modal characteristics are analyzed by using finite element analysis (FEA), including stroke, natural frequency and so on. These three compliant stages are driven by electromagnetic drive, and the actual stroke, coupled displacement, and repeat positioning accuracy are considered to test and verify the correctness of FEA. The experimental results show that, compared to traditional compliant joints, notch joints and leaf springs, the novel 2-DOF micro-positioning stage based on periodically CF units has large stroke and high positioning accuracy. That's a quit important reference value for the research of compliant precision positioning stage.
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