：Subsurface damage which is generated during processing of brittle materials has a significant impact on the material of life,property and the mass of removals in the next step. The detection of subsurface damage is very important for guiding the process and strengthening the control of process. The four aspects,including destructive detection technology,non-destructive detection technology,theoretical model predictions and comparison of the application effects of subsurface damage detection method,are elaborated and analyzed. Different detection methods are compared. Its principles,advantages,disadvantages and applications are illustrated. The present situation of scientific research in this field is summarized and the future development trend is prospected.