Radio frequency identification (RFID) technology has been widely applied in manufacturing process tracking. But the existing RFID models can only adapt to the separate scenes and lack of universal modeling methods. An RFID-based graphical formalized deduction method is proposed for process tracking. Operation sequence unit (OSU) of single process is built by multi-granularity process decomposition. Four kinds of RFID detecting mode and their state block model are described. By deploying state blocks to the OSUs, the graphical RFID process tracking flow for a single process (SPTF) is formed. Based on that, through series/parallel/alternative connection of SPTFs, the graphical RFID process tracking flow for multi-processes is built. Finally, three application cases are discussed to verify the feasibility and universality of the proposed models and methods, including cutting-tool turning process tracking, part machining process tracking in a job-shop and the cross-enterprise part outsourcing production tracking.