The multi-scale contact behavior has distinct impact on surface functional performances. To study the multi-scale contact behavior of metal surfaces,a method based on deterministic model of rough surfaces is presented. In this method,the surface data is measured using the profilometer,then the wavelet filter is used to decompose the measured rough surface. Based on the filtered data,the deterministic models of rough surfaces can be built using finite element method. The method is used to analyze the variation of dimensionless contact area with dimensionless contact load. The results show that the curves rise linearly with the same slope in a small pseudo-period,while the curves in a large pseudo-period rise in an exponential trend and rise with a steeper ratio as the pseudo-period increases. The effects of material properties on contact behavior in different scales are also analyzed. At last,the presented model and the results are validated by solving the Gaussian surface.