Analytical Deflection Model and Parametric Optimization of a Circular Diaphragm-type Piezoactuator

  • LIANG Xin ,
  • HU Yuanlin ,
  • WANG Wen
Expand
  • Institute of Refrigeration and Cryogenics, Shanghai Jiao Tong University, Shanghai 200240

Received date: 2017-08-05

  Revised date: 2017-12-15

  Online published: 2018-05-20

Abstract

With the theory of thin diaphragm deformation and the piezoelectric constitutive equation, under the constant voltage conditions, an analytical model on deflection of a circular piezoelectric actuator is proposed to investigate the stress distribution of the actuator. Based on the geometric parameters and material properties of the literatures, the model results agree with the literature experimental data and simulations within 10%. Furthermore, the accuracy of model results is also validated by experiments with the maximal offset less than 7%. Thus, the model results are used for studying the impacts on piezoelectric actuator displacement in the different parameters, which include the voltage, the radius ratio and the thickness of piezoelectric layer and elastic layer. The results show that:the displacement of circular piezoelectric actuator linearly varies with the voltage, and the optimized radius ratio of piezoelectric layer and elastic layer is 0.75 to obtain the maximal center displacement of circular piezoelectric actuator. Moreover, when the voltage, material properties and radius ratio are fixed, the impacts on the displacement of circular piezoelectric diaphragm under the different thickness of piezoelectric layer and elastic layer are analyzed. With the fixed thickness of the multi-layer, the optimal thickness ratio of piezoelectric layer and elastic layer is obtained by analytical model results. By analyzing the different influences of these parameters, the structure design of a circular piezoelectric actuator is guided and optimized.

Cite this article

LIANG Xin , HU Yuanlin , WANG Wen . Analytical Deflection Model and Parametric Optimization of a Circular Diaphragm-type Piezoactuator[J]. Journal of Mechanical Engineering, 2018 , 54(10) : 1 -9 . DOI: 10.3901/JME.2018.10.001

References

[1] 于月民, 冷劲松. 新型压电旋转驱动器的设计与性能测试[J]. 机械工程学报, 2015, 51(8):185-190. YU Yuemin, LENG Jinsong. Design and performance testing of a new type of piezoelectric rotary actuator[J]. Journal of Mechanical Engineering, 2015, 51(8):185-190.
[2] BABOROWSKI J, MURALT P, LEDERMANN N, et al. PZT coated membrane structures for micromachined ultrasonic transducers[J]. Proceedings of the IEEE Ultrasonics Symposium, 2002, 2:483-486.
[3] 卢晓光. 压电薄膜微力传感器特性研究[D]. 大连:大连理工大学, 2006. LU Xiaoguang, Study on microforce sensor based on piezoelectric thin film[D]. Dalian:Dalian University of Technology, 2006.
[4] 金雷, 贾振元, 刘巍. 压电力传感器晶片与电极接触刚度影响研究[J]. 机械工程学报, 2016, 52(22):15-23. JIN Lei, JIA Zhenyuan, LIU Wei. Research on the influence of the contact stiffness of the electric power sensor wafers with the electrode contact[J]. Journal of Mechanical Engineering,2016,52(22):15-23.
[5] GOMES L T. Effect of damping and relaxed clamping on a new vibration theory of piezoelectric diaphragms[J]. Sensors and Actuators A:Physical, 2011, 169(1):12-17.
[6] CUI Q, LIU C, ZHA X F. Modeling and numerical analysis of a circular piezoelectric actuator for valveless micropumps[J]. Journal of Intelligent Material Systems and Structures, 2008, 19(10):1195-1205.
[7] DESHPANDE M, SAGGERE L. An improved analytical model for deflections of a circular multi-layer piezoelectric actuator[C]//ASME 2005 International Mechanical Engineering Congress and Exposition, New York. 2005:415-423.
[8] DESHPANDE M, SAGGERE L. An analytical model and working equations for static deflections of a circular multi-layered diaphragm-type piezoelectric actuator[J]. Sensors and Actuators A:Physical, 2007, 136(2):673-689.
[9] LI S, CHEN S. Analytical analysis of a circular PZT actuator for valveless micropumps[J]. Sensors and Actuators A:Physical, 2003, 104(2):151-161.
[10] ZHANG T, WANG Q M. valveless piezoelectric micropump for fuel delivery in direct methanol fuel cell (DMFC) devices[J]. Journal of Power Sources, 2005, 140(1):72-80.
[11] RIHAN Y. Design and simulation of a valveless piezoelectric micropump for fuel delivery in fuel cell devices[J]. Journal of New Technology and Materials, 2014, 2(1):5.
[12] HUANG C H, LIN Y C, MA C C. Theoretical analysis and experimental measurement for resonant vibration of piezoceramic circular plates[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2004, 51(1):12-24.
[13] KHORSHIDI K, REZAEI E, GHADIMI A A, et al. Active vibration control of circular plates coupled with piezoelectric layers excited by plane sound wave[J]. Applied Mathematical Modelling, 2015, 39(3):1217-1228.
[14] 范勇. 压电致动式微泵的驱动装置结构[D]. 西安:西安电子科技大学, 2001 FAN Yong, Analysis and design on the actuator structure of micro pump with piezoelectric actuator[D].Xi'an:Xidian University, 2001.
[15] WANG D H, HUO J. Modeling and testing of the static deflections of circular piezoelectric unimorph actuators[J]. Journal of Intelligent Material Systems and Structures, 2010, 21(16):1603-1616.
[16] KAN J W, TANG K H, ZHU G. Study on a piezohydraulic pump for linear actuators[J]. Sensors and Actuators 2009, 149:331-339.
[17] KUHN P. Die maxwellgleichung mit wechselnden Randbedingungen (the maxwell equation with mixed boundary conditions)[J]. Mathematik und Informatik of the University of Essen, 2011, 12:1-58.
[18] 陈位宫, 胡德淦, 郁建伟. 工程力学[M]. 北京:高等教育出版社, 2012. CHEN Weigong, HU Degan, YU Jianwei. Engineering mechanics[M]. Beijing:Higher Education Press, 2012.
[19] 王春雷, 李吉超, 赵明磊. 压电铁电物理[M]. 北京:科学出版社, 2009. WANG Chunlei,LI Jichao,ZHAO Minglei. Piezoelectric ferroelectric physics[M]. Beijing:Science Press, 2009.
[20] 王矜奉, 苏文斌, 王春明. 压电振动理论与应用[M]. 北京:科学出版社, 2011. WANG Jinfeng,SU Wenbin,WANG Chunming. Theory and application of piezoelectric vibration[M]. Beijing:Science Press, 2011.
[21] TIMOSHENKO S P, WOINOWSKY K S. Theory of plates and shells[M]. New York:McGraw-Hill, 1959.
[22] JONES R M. Mechanics of composite materials[M]. Washington, D C:Scripta Book Company, 1975.
[23] DONG S, UCHINO K, LI L, et al. Analytical solutions for the transverse deflection of a piezoelectric circular axisymmetric unimorph actuator[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency control, 2007, 54(6):1240-1249.
Outlines

/