The mostly applied displacement sensors and time grating sensors with novel measurement principles are classified according to measurement standard, measurement principles, mathematical models and manufacturing materials. In addition, the similarity, the differences, the benefits and the disadvantages of these sensors are analyzed, as well as their applications. The advances in measurement principles of time grating sensors are introduced, the testing results of time grating from National Institute of Measurement and Testing Technology(NIMTT), an institute of legal verification of China, are that the indication errors are within ±0.8″ in any 0°-360° measuring range for angular time grating sensors, and the accuracy of linear time grating is ±0.5 μm/m. The resolutions can reach 0.1″and 0.1 μm, respectively. In order to further improve the accuracy of time grating up to nanometer scale, the nanometer time grating sensors based on the principles of electrical field and optical field are analyzed. In addition, derivative technology of time grating sensors, parasitic time grating sensors, and its application prospects for extreme environments are introduced.
PENG Donglin
,
FU Min
,
CHEN Xihou
,
LIU Xiaokang
,
TANG Qifu
,
WU Liang
. Classification Study on Typical Displacement Sensors and Analysis on the Characteristics of Time Grating Sensors[J]. Journal of Mechanical Engineering, 2018
, 54(10)
: 36
-42
.
DOI: 10.3901/JME.2018.10.036
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