Six kinds of nano-multilayer graphite-like carbon (GLC) films with different modulation periods of 300 nm, 180 nm, 90 nm, 15 nm and 8 nm are deposited by a plasma enhanced multi targets magnetron sputtering system. The influence of modulation period of pure GLC film and W-GLC film on the mechanical and tribological properties of the films is analyzed. The test results show that all the deposited nano-multilayer GLC films present good mechanical and tribological properties, which improve with the decrease of modulation period and show remarkable synergistic effect. The excellent mechanical properties of the films can be attributed to the dispersion strengthening effect of WC or W2C nanocrystals and the interfacial effect of multilayers, while the formation of thick and dense transfer film guarantee the film's good tribological properties. When the modulation period reduces to 8nm, the film hardness reaches 35.13 GPa, and the corresponding adhesive strength is 45.28 N,H/E is 0.109 5,H3/E2 is 0.375, and the film has the lowest average friction coefficient of 0.002 and wear rate of 9.0×10-18 m3/(N·m) when tested at a load of 12 N and a sliding rate of 100 r/mim for 480 minutes, which shows excellent comprehensive performance.
MA Guozheng
,
YONG Qingsong
,
WANG Haidou
,
HE Pengfei
,
XU Binshi
. Influence of Modulation Period on the Mechanical and Tribological Properties of Nano-multilayer Graphite-like Carbon Films[J]. Journal of Mechanical Engineering, 2018
, 54(15)
: 92
-99
.
DOI: 10.3901/JME.2018.15.092
[1] 雍青松,王海斗,徐滨士,等. 类金刚石薄膜摩擦机理及其摩擦学性能影响因素的研究现状[J]. 机械工程学报,2016,52(11):95-107. YONG Qinsong,WANG Haidou,XU Binshi,et al. Research status of the tribological property of diamond-like carbon films[J]. Journal of Mechanical Engineering,2016,52(11):95-107.
[2] HONG Chaofu,TU Jiangping,LI Ruiling,et al. Structure of sp2 dominant a-C film with superhardness[J]. Journal of Physics D:Applied Physics,2009,42(21):215303.
[3] ZENG X T,ZHANG S,DING X Z,et al. Comparison of three types of carbon composite coatings with exceptional load-bearing capacity and high wear resistance[J]. Thin Solid Films,2002,420-421:366-370.
[4] JARRATT M,STALLARD J,RENEVIER N M,et al. An improved diamond-like carbon coating with exceptional wear properties[J]. Diamond and Related Materials,2003,12(3-7):1003-1007.
[5] GUAN Xiaoyan,LU Zhibin,WANG Liping. Achieving high tribological performance of graphite-like carbon coatings on Ti6Al4V in aqueous environments by gradient interface design[J]. Tribology Letters,2011,44(3):315-325.
[6] WANG Yongxin,WANG Liping,XUE Qunji. Influence of Ti target current on microstructure and properties of Ti-doped graphite-like carbon films[J]. Transactions of Nonferrous Metals Society of China,2012,22(6):1372-1380.
[7] TIAN Hui,YANG Taisheng,CHEN Yuqing. Synthesis and characterization of carbon/silica super hydrophobic multi-layer films[J]. Thin Solid Films,2010,518:5183-5187.
[8] WANG Yongxin,WANG Linping,ZHANG Guangan,et al. Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon films synthesized by magnetron sputtering[J]. Surface and Coatings Technology,2010,205(3):793-800.
[9] CHEN Jianmin,WANG Yongjun,LI Hongxuan,et al. Microstructure,morphology and properties of titanium containing graphite-like carbon films deposited by unbalanced magnetron sputtering[J]. Tribology Letters,2013,49(1):47-59.
[10] ROBERTSON J. Diamond-like amorphous carbon[J]. Materials Science and Engineering R,2002,37(4-6):129-281.
[11] WANG Xinchang,WANG Liang,SHEN Bin,et al. Friction and wear performance of boron doped,undoped microcrystalline and fine grained composite diamond films[J]. Chinese Journal of Mechanical Engineering,2015,28(1):155-163.
[12] YONG Qingsong,MA Guozheng,WANG Haidou,et al. Structure and properties of GLC films deposited by PEMS[J]. Surface Engineering,2016,32(11):853-860.
[13] YONG Qingsong,MA Guozheng,WANG Haidou,et al. Influence of W content on microstructure and properties of W-doped graphite-like carbon films[J]. Journal of Materials Research,2016,31(23):3766-3776.
[14] MIAO Yuqing,WANG Hua,SHAO Yuyan,et al. Layer-by-layer assembled hybrid film of carbon nanotubes/iron oxide nanocrystals for reagentless electrochemical detection of H2O2[J]. Sensors and Actuators B:Chemical,2009,138(1):182-188.
[15] 薛群基,王立平. 类金刚石碳基薄膜材料[M]. 北京:科学出版社,2012. XUE Qunji,WANG Liping. Diamond-like carbon film material[M]. Beijing:Science Press,2012.
[16] ZHU Aibin,LI Pei,ZHANG Yefan,et al. Influence of particles on the loading capacity and the temperature rise of water film in ultra-high speed hybrid bearing[J]. Chinese Journal of Mechanical Engineering,2015,28(3):541-548.
[17] HERTZBERG R W. Deformation and fracture mechanics of engineering materials[M]. New York:Wiley,1996.
[18] VEPREK S,REIPRICH S. A concept for the design of novel superhard coatings[J]. Thin Solid Films,1995,268(1-2):64-71.
