Low-frequency vibration has a destructive impact on high-precision machining and measurement, which is difficult to be reduced effectively by passive isolation. High precision measurement for low-frequency vibration is the first step of active isolation. A cantilever type low-frequency acceleration sensor based on DVD optical pickup is proposed. The design principle and structure of low-frequency accelerator are introduced. A high precision displacement sensor is modified from DVD pickup head. An elastic cantilever beam is used to sensor the vibration,which was analyzed and optimized iteratively and the proper material, sizes and natural frequency of the beam were obtained. The signal processing circuits are also finished. A homemade vibration generator is used as an exciter, and a high-precision eddy current sensor is used as a standard. The experimental results show that the accelerometer has a sensitivity of 9.26 V/g, a measuring frequency of 3~10 Hz, a measurement range of 0.4~32.8 mg, a measurement standard deviation of less than 0.01 mg, and a resonance of 44 Hz. It can be used to detect the low frequency micro vibrations.
LI Ruijun
,
CHANG Zhenxin
,
LEI Yingjun
,
HU Penghao
,
FAN Guangzhao
. Low-frequency Accelerometer Based on DVD Pick-up Head and Cantilever[J]. Journal of Mechanical Engineering, 2019
, 55(2)
: 10
-17
.
DOI: 10.3901/JME.2019.02.010
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