Development on Synergistic Process and Machine Tools Integrated Inclined Axis Grinding and Magnetorheological Polishing for Small Aspheric Surface

  • YIN Shaohui ,
  • GONG Sheng ,
  • HE Bowen ,
  • CHEN Fengjun ,
  • YIN Ziqiang ,
  • CAO Chengguo
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  • 1. National Engineering Research Center for High Efficiency Grinding, Hunan University, Changsha 410082;
    2. Hunan Provincial Key Laboratory of Intelligent Laser Manufacturing, Hunan university, Changsha 410082;
    3. Hunan Key Laboratory of Ultra-precision Machining Technology, National University of Defense Technology, Changsha 410073;
    4. Beijing Precision Machinery & Engineering Research Co., LTD, Beijing 101312

Received date: 2017-12-06

  Revised date: 2018-06-18

  Online published: 2018-11-05

Abstract

To improve machining efficiency and accuracy for small aspheric molds, a synergistic process integrated inclined axis grinding and magnetorheological polishing is proposed. It can reduce clamping time and installation error to integrate the two ultra-precision processes on one machine. A new type of machining tool is developed. Grinding experiments for aspheric molds in diameter Ф6.6mm are carried out. Surface roughness Ra of is largely improved from Ra 6.8 nm after grinding to Ra 0.7 nm after magnetorheological polishing. The ground surface is reached PV(Peak-Valley) 221 nm after polishing. The experimental results showed that the synergistic process may improve efficiency and accuracy for machining small aspheric molds.

Cite this article

YIN Shaohui , GONG Sheng , HE Bowen , CHEN Fengjun , YIN Ziqiang , CAO Chengguo . Development on Synergistic Process and Machine Tools Integrated Inclined Axis Grinding and Magnetorheological Polishing for Small Aspheric Surface[J]. Journal of Mechanical Engineering, 2018 , 54(21) : 205 -211 . DOI: 10.3901/JME.2018.21.205

References

[1] CHEN F J,YIN S H,HUANG H,et al. Profile error compensation in ultra-precision grinding of aspheric surfaces with on-machine measurement[J]. International Journal of Machine Tools and Manufacture,2010,50(5):480-486.
[2] CHEN F J,YIN S H,OHMORI H,et al. Form error compensation in single-point inclined axis nanogrinding for small aspheric insert[J]. International Journal of Machine Tools and Manufacture,2013,65(1-4):433-441.
[3] BEAUCAMP A,FREEMAN R,MORTON R,et al. Removal of diamond turning signatures on X-ray mandrels and metal optics by fluid-jet polishing[C]//Proceedings of the SPIE-The International Society for Optical Engineering. Marseille,France,2008,7018:701835-l-7.
[4] GAO S,KANG R K,GUO D M,et al. Study on the subsurface damage distribution of the silicon wafer ground by diamond wheel[J]. Advanced Materials Research,2010,128:113-118.
[5] 袁巨龙,吴喆,吕冰海,等. 非球面超精密抛光技术研究现状[J]. 机械工程学报,2012,48(23):167-177. YUAN Julong,WU Zhe,LÜ Binghai,et al. Review on ultra-precision polishing technology of aspheric surface[J]. Journal of Mechanical Engineering,2012,48(23):167-177.
[6] CHEN F J,MIAO X L,TANG Y,et al. A review on recent advances in machining methods based on abrasive jet polishing(AJP)[J]. International Journal of Advanced Manufacturing Technology,2016:1-15.
[7] WANG Y Q,YIN S H,HUANG H. Polishing characteristics and mechanism in magnetorheo-logical planarization using a permanent magnetic yoke with translational movement[J]. Precision Engineering,2016,43:93-104.
[8] TRICARD M,KORDONSKI W I,SHOREY A B. Magnetorheological jet finishing of conformal freeform and steep concave optics[J]. CIRP Annals-Manufacturing Technology,2006,55(1):309-312.
[9] BEAUCAMP A,NAMBA Y,INASAKI I,et al. Finishing of optical moulds X/20 by automated corrective polishing[J]. CIRP Annals Manufacturing Technology,2011,60(1):375-378.
[10] GUO J,MORITA S,HARA M,et al. Ultra-precision finishing of micro-aspheric mold using a magnetostrictive vibrating polisher[J]. CIRP Annals-Manufacturing Technology,2012,61(1):371-374.
[11] WANG Y Q,YIN S H,HUANG H,et al. Magnetorheological polishing using a permanent magnetic yoke with straight air gap for ultra-smooth surface planarization[J]. Precision Engineering. 2015,40(1):309-317.
[12] NGUYEN N T,YIN S H,CHEN F J,et al. Multi-objective optimization of circular magnetic abrasive polishing of SUS304 and Cu materials[J]. Journal of Mechanical Science and Technology,2016,30(6):2643-2650.
[13] 王永强,尹韶辉,魏长青,等. 高效磁流变平整加工中的励磁装置优化及试验研究[J]. 机械工程学报,2015,51(17):184-193. WANG Yongqiang,YIN Shaohui,WEI Changqing,et al. Optimization of magnetic excitation unit in high efficiency magnetorheological planarization and experimental study[J]. Journal of Mechanical Engineering,2015,51(17):184-193.
[14] 龚胜,王永强,尹韶辉,等. 应用环形磁场控制的微粉砂轮制备及其磨削性能[J]. 机械工程学报,2016,52(17):78-85. GONG Sheng,WANG Yongqiang,YIN Shaohui,et al. Fabrication of fine grinding wheel controlled by annular magnetic field and its grinding performance[J]. Journal of Mechanical Engineering,2016,52(17):78-85.
[15] 徐志强,尹韶辉,陈逢军,等. 小口径非球面的超精密车削和抛光组合加工[J]. 纳米技术与精密工程,2013,11(6):479-484 XU Zhiqiang,YIN Shaohui,CHEN Fengjun,et al. Combined process of ultra-precision turning and polishing technology for small aspheric surface[J]. Nanotechnology and Precision Engineering,2013,11(6):479-484
[16] 尹韶辉,陈逢军,龚胜,等. 小口径非球面光学玻璃透镜模具超精密数控复合机床的研发与应用[J]. 世界制造技术与装备市场,2016(4):24-29. YIN Shaohui,CHEN Fengjun,GONG Sheng,et al. Research and application of compound ultra-precision CNC machine for small aspherical optical glass lens molds[J]. World Manufacturing Engineering & Market,2016(4):24-29.
[17] 尹韶辉,徐志强,陈逢军,等. 小口径非球面斜轴磁流变抛光技术[J]. 机械工程学报,2013,49(17):33-38. YIN Shaohui,XU Zhiqiang,CHEN Fengjun,et al. Inclined axis magnetorheological finishing technology for small aspherical surface[J]. Journal of Mechanical Engineering,2013,49(17):33-38.
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