Chemical Mechanical Polishing Using Magnetic Composite Abrasives Slurry and Experimental Study on Polishing Performance

XU Xuefeng;GUO Quan;HUANG Yishen;HU Jiande;PENG Wei

Journal of Mechanical Engineering ›› 2011, Vol. 47 ›› Issue (21) : 186-192.

PDF(1564 KB)
PDF(1564 KB)
Journal of Mechanical Engineering ›› 2011, Vol. 47 ›› Issue (21) : 186-192.
Article

Chemical Mechanical Polishing Using Magnetic Composite Abrasives Slurry and Experimental Study on Polishing Performance

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 47(21): 186-192

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(1564 KB)

Accesses

Citation

Detail
Sections
Recommended
　 Copyright © Journal of Mechanical Engineering, All Rights Reserved.
Powered by Beijing Magtech Co. Ltd,.

/

〈 〉