Ultra-precision Motion Control and Synchronization Control for Stage of Lithography

TENG Wei;LIU Yibing;MU Haihua

Journal of Mechanical Engineering ›› 2011, Vol. 47 ›› Issue (11) : 185-190.

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Journal of Mechanical Engineering ›› 2011, Vol. 47 ›› Issue (11) : 185-190.
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Ultra-precision Motion Control and Synchronization Control for Stage of Lithography

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 47(11): 185-190

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