Algorithm of Trajectory Overlay Planning for Step- and Scan-move in Scanner Lithography

MU Haihua;ZHOU Yunfei;ZHOU Yanhong

Journal of Mechanical Engineering ›› 2010, Vol. 46 ›› Issue (7) : 122-127.

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PDF(612 KB)
Journal of Mechanical Engineering ›› 2010, Vol. 46 ›› Issue (7) : 122-127.
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Algorithm of Trajectory Overlay Planning for Step- and Scan-move in Scanner Lithography

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 46(7): 122-127

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