Study for MEMS Accelerometer of Quartz Resonant with High Sensitivity and Large Bandwidth

ZHANG Yuhang, ZHAO Yulong, LI Cun, XUE Hong

Journal of Mechanical Engineering ›› 2026, Vol. 62 ›› Issue (10) : 375-388.

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Journal of Mechanical Engineering ›› 2026, Vol. 62 ›› Issue (10) : 375-388. DOI: 10.3901/JME.260505

Study for MEMS Accelerometer of Quartz Resonant with High Sensitivity and Large Bandwidth

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 62(10): 375-388 https://doi.org/10.3901/JME.260505

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