Investigation on Non-contact Conformal Polishing of Microlens Array Mold

LI Linguang, JING Zhao, MENG Deqing, REN Mingjun, ZHU Limin, GUO Jiang

Journal of Mechanical Engineering ›› 2026, Vol. 62 ›› Issue (7) : 418-426.

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Journal of Mechanical Engineering ›› 2026, Vol. 62 ›› Issue (7) : 418-426. DOI: 10.3901/JME.260387

Investigation on Non-contact Conformal Polishing of Microlens Array Mold

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 62(7): 418-426 https://doi.org/10.3901/JME.260387

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