Tribological Behavior Regulation of Graphene Nanocrystallites Embedded Carbon Film by Fluorine Plasma Etching

GUO Meiling, YANG Lei, LI Pengyang, XU Zhentao, XU Chaoyuan, WANG Quandai, LI Yan

Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (15) : 216-226.

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Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (15) : 216-226. DOI: 10.3901/JME.2024.15.216

Tribological Behavior Regulation of Graphene Nanocrystallites Embedded Carbon Film by Fluorine Plasma Etching

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 60(15): 216-226 https://doi.org/10.3901/JME.2024.15.216

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