Mechanism Analysis and Experimental Verification of Ultrasonic Cavitation Assisted Diamond Wire Saw Cutting Monocrystalline Silicon

WANG Yan, HE Shun, CHEN Yizhang, JIANG Chen, QIAN Zhaofeng, CHEN Haoyi

Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (9) : 114-126.

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Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (9) : 114-126. DOI: 10.3901/JME.2024.09.114

Mechanism Analysis and Experimental Verification of Ultrasonic Cavitation Assisted Diamond Wire Saw Cutting Monocrystalline Silicon

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 60(9): 114-126 https://doi.org/10.3901/JME.2024.09.114

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