Experimental Study on Friction-induced Chemical-mechanical Composite Machining (FCMM) of 4H-SiC Single Crystal

ZHANG Bonan, HUANG Hui, WU Min

Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (7) : 401-410.

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Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (7) : 401-410. DOI: 10.3901/JME.2024.07.401

Experimental Study on Friction-induced Chemical-mechanical Composite Machining (FCMM) of 4H-SiC Single Crystal

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 60(7): 401-410 https://doi.org/10.3901/JME.2024.07.401

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