Numerical Modeling and Experimental Study of the Reaction Process in Silicon Epitaxial Growth Reaction Chamber

DENG Shiwei, SHEN Wenjie, CHEN Yuhong, BAI Tian, MEI Deqing, WANG Yancheng

Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (5) : 209-218.

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Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (5) : 209-218. DOI: 10.3901/JME.2024.05.209

Numerical Modeling and Experimental Study of the Reaction Process in Silicon Epitaxial Growth Reaction Chamber

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 60(5): 209-218 https://doi.org/10.3901/JME.2024.05.209

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