Study on High Precision Thin Film Temperature Sensor Based on Multi-node Array Structure

TIAN Bian, LIU Jiangjiang, ZHANG Zhongkai, LIU Zhaojun, MA Rong, LIN Qijing, JIANG Zhuangde

Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (4) : 92-100.

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Journal of Mechanical Engineering ›› 2024, Vol. 60 ›› Issue (4) : 92-100. DOI: 10.3901/JME.2024.04.092

Study on High Precision Thin Film Temperature Sensor Based on Multi-node Array Structure

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2024, 60(4): 92-100 https://doi.org/10.3901/JME.2024.04.092

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