Study on Mechanical Properties of Nitrogen-doped ta-C Thin Films Prepared by Multi-stage Triggered Pulsed Arc Source Technology

ZHAO Dongcai, MA Zhanji, LIU Xingguang, ZHENG Jun, ZHANG Ziyang

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (24) : 108-117.

PDF(495 KB)
PDF(495 KB)
Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (24) : 108-117. DOI: 10.3901/JME.2023.24.108

Study on Mechanical Properties of Nitrogen-doped ta-C Thin Films Prepared by Multi-stage Triggered Pulsed Arc Source Technology

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(24): 108-117 https://doi.org/10.3901/JME.2023.24.108

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(495 KB)

Accesses

Citation

Detail
Sections
Recommended
　 Copyright © Journal of Mechanical Engineering, All Rights Reserved.
Powered by Beijing Magtech Co. Ltd,.

/

〈 〉