Prediction of Surface Roughness in Chemical Mechanical Polishing of FeCrAl

GUO Jiang, YANG Zhe, ZHANG Pengfei, LI Linguang, YU Xuewen, PAN Bo

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (23) : 310-319.

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Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (23) : 310-319. DOI: 10.3901/JME.2023.23.310

Prediction of Surface Roughness in Chemical Mechanical Polishing of FeCrAl

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(23): 310-319 https://doi.org/10.3901/JME.2023.23.310

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