Calibration Methods and Error Analysis of the Lateral Force of Atomic Force Microscope Probes

LANG Haojie, PENG Yitian, BAO Qifan, DING Shuyang, HUANG Yao

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (22) : 196-206.

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Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (22) : 196-206. DOI: 10.3901/JME.2023.22.196

Calibration Methods and Error Analysis of the Lateral Force of Atomic Force Microscope Probes

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(22): 196-206 https://doi.org/10.3901/JME.2023.22.196

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