Repeatability Characterization and Compensation in Micro-scale Displacement for Precise Linear Stage Based on Micro-dynamics Analysis

TANG Hao, ZHANG He, ZHANG Dong, GAO Guibing, ZHENG Yu

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (21) : 110-120.

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Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (21) : 110-120. DOI: 10.3901/JME.2023.21.110

Repeatability Characterization and Compensation in Micro-scale Displacement for Precise Linear Stage Based on Micro-dynamics Analysis

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(21): 110-120 https://doi.org/10.3901/JME.2023.21.110

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