Surface Topography Evolution of Single Crystal Silicon in Laser Polishing

LI Tao, HUANG Weiqi, LONG Gui, YANG Sishuo, ZHANG Jianguo, XIAO Junfeng, XU Jianfeng

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (21) : 52-64.

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Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (21) : 52-64. DOI: 10.3901/JME.2023.21.052

Surface Topography Evolution of Single Crystal Silicon in Laser Polishing

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(21): 52-64 https://doi.org/10.3901/JME.2023.21.052

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