Research Advances in Several Key Technologies for High Precision and High Efficiency Manufacturing of Electronic Devices

CHEN Xin, CHEN Yun, YANG Zhijun, GAO Jian, CHEN Xun

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (19) : 164-175.

PDF(880 KB)
PDF(880 KB)
Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (19) : 164-175. DOI: 10.3901/JME.2023.19.164

Research Advances in Several Key Technologies for High Precision and High Efficiency Manufacturing of Electronic Devices

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(19): 164-175 https://doi.org/10.3901/JME.2023.19.164

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(880 KB)

Accesses

Citation

Detail
Sections
Recommended
　 Copyright © Journal of Mechanical Engineering, All Rights Reserved.
Powered by Beijing Magtech Co. Ltd,.

/

〈 〉