Positioning Accuracy Characterization Approach in Micro-scale Displacement for Precise Linear Stage Based on Stream of Variation Theory

TANG Hao, ZHANG Dong, ZHANG He, GAO Guibing, ZHENG Yu

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (13) : 49-58.

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Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (13) : 49-58. DOI: 10.3901/JME.2023.13.049

Positioning Accuracy Characterization Approach in Micro-scale Displacement for Precise Linear Stage Based on Stream of Variation Theory

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(13): 49-58 https://doi.org/10.3901/JME.2023.13.049

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