Capillary Force Based Micromanipulation of Chips

Capillary Force Based Micromanipulation of Chips

WANG Binkai, CHANG Bo, ZHANG Heng

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (6) : 285-294,308.

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Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (6) : 285-294,308. DOI: 10.3901/JME.2023.06.285

Capillary Force Based Micromanipulation of Chips

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(6): 285-294,308 https://doi.org/10.3901/JME.2023.06.285

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