High-performance p+ Si/Au Thermopile-based Gas Flow Sensor in （111） Silicon and Its Packaging Technology

HUANG Tao, WANG Jiachou, LI Xinxin

Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (2) : 30-38.

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Journal of Mechanical Engineering ›› 2023, Vol. 59 ›› Issue (2) : 30-38. DOI: 10.3901/JME.2023.02.030

High-performance p+ Si/Au Thermopile-based Gas Flow Sensor in （111） Silicon and Its Packaging Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2023, 59(2): 30-38 https://doi.org/10.3901/JME.2023.02.030

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