Research Status and Prospect on Polishing Technology of Large Size Single Crystal Diamond Substrate

WEN Hailang, XIAO Ping, LU Jing

Journal of Mechanical Engineering ›› 2021, Vol. 57 ›› Issue (22) : 157-171.

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Journal of Mechanical Engineering ›› 2021, Vol. 57 ›› Issue (22) : 157-171. DOI: 10.3901/JME.2021.22.157

Research Status and Prospect on Polishing Technology of Large Size Single Crystal Diamond Substrate

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 57(22): 157-171 https://doi.org/10.3901/JME.2021.22.157

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