An In-situ Online Micro-nano Structure Read-write Method Based on Scanning Probe

LIAO Xiaobo, ZHUANG Jian, DENG Yalou, WANG Zhiwu, JIAOYANG Bohan, CAI Yong, LIAO Xuan

Journal of Mechanical Engineering ›› 2021, Vol. 57 ›› Issue (5) : 148-156.

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Journal of Mechanical Engineering ›› 2021, Vol. 57 ›› Issue (5) : 148-156. DOI: 10.3901/JME.2021.05.148

An In-situ Online Micro-nano Structure Read-write Method Based on Scanning Probe

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 57(5): 148-156 https://doi.org/10.3901/JME.2021.05.148

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