Study on Multi-channel Discharge Mechanism of Semiconductor Silicon Electrode

QIU Mingbo, FU Jiongbo, DUAN Yajun, SHEN Lida, HAN Yunxiao

Journal of Mechanical Engineering ›› 2019, Vol. 55 ›› Issue (21) : 208-214.

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Journal of Mechanical Engineering ›› 2019, Vol. 55 ›› Issue (21) : 208-214. DOI: 10.3901/JME.2019.21.208

Study on Multi-channel Discharge Mechanism of Semiconductor Silicon Electrode

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 55(21): 208-214 https://doi.org/10.3901/JME.2019.21.208

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