Preparation and Characterization of Ti<sub>2</sub>AlN Films

Preparation and Characterization of Ti₂AlN Films

LIU Kexin, WANG Lei, LIU Jialei, JIN Songzhe

Journal of Mechanical Engineering ›› 2019, Vol. 55 ›› Issue (16) : 77-84.

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Journal of Mechanical Engineering ›› 2019, Vol. 55 ›› Issue (16) : 77-84. DOI: 10.3901/JME.2019.16.077

Preparation and Characterization of Ti₂AlN Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 55(16): 77-84 https://doi.org/10.3901/JME.2019.16.077

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