Effect of Different Oxidizers on Chemical Mechanical Polishing of 6H-SiC

NI Zifeng, CHEN Guomei, XU Laijun, BAI Yawen, LI Qingzhong, ZHAO Yongwu

Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (19) : 224-231.

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Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (19) : 224-231. DOI: 10.3901/JME.2018.19.224

Effect of Different Oxidizers on Chemical Mechanical Polishing of 6H-SiC

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 54(19): 224-231 https://doi.org/10.3901/JME.2018.19.224

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