Modeling of Flexible Composite Mold for Nanoimprint Lithography

LI Yanqiang, LAN Hongbo, XU Quan, LIANG Sen, LIU Hongzhong

Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (19) : 170-181.

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Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (19) : 170-181. DOI: 10.3901/JME.2018.19.170

Modeling of Flexible Composite Mold for Nanoimprint Lithography

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 54(19): 170-181 https://doi.org/10.3901/JME.2018.19.170

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