Monitoring of Semiconductor Manufacturing Process Based on Functional Data Analysis

LI Min, XIE Xuan, CHEN Ze, YANG Mengyao, YANG Debin, JIANG Jing

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Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (16) : 62-69. DOI: 10.3901/JME.2018.16.062

Monitoring of Semiconductor Manufacturing Process Based on Functional Data Analysis

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 54(16): 62-69 https://doi.org/10.3901/JME.2018.16.062

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