Characterization and Measurement of Elastic Modulus Based on Ultrasonic Atomic Force Microscopy for Nano-porous Silicon Oxide Film

ZHANG Gaimei, WANG Can, SONG Xiaoli, HE Cunfu, CHEN Qiang

Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (12) : 109-114.

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Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (12) : 109-114. DOI: 10.3901/JME.2018.12.109

Characterization and Measurement of Elastic Modulus Based on Ultrasonic Atomic Force Microscopy for Nano-porous Silicon Oxide Film

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 54(12): 109-114 https://doi.org/10.3901/JME.2018.12.109

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