Pull-in Voltage Analysis of Electrostatically Actuated Stepped Micro-cantilever Beam

ZHU Junhua, SU Wei, LIU Renhuai, SONG Fangfang, HUANG Qinwen

Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (8) : 217-222.

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Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (8) : 217-222. DOI: 10.3901/JME.2018.08.217

Pull-in Voltage Analysis of Electrostatically Actuated Stepped Micro-cantilever Beam

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 54(8): 217-222 https://doi.org/10.3901/JME.2018.08.217

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