Measurement of Surface Acoustic Wave Velocity Curves of Silicon Crystal by Ultrasonic Method

SONG Guorong, HONG Guangfu, LU Dong, LÜ Yan, HE Cunfu, WU Bin

Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (6) : 110-117.

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Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (6) : 110-117. DOI: 10.3901/JME.2018.06.110

Measurement of Surface Acoustic Wave Velocity Curves of Silicon Crystal by Ultrasonic Method

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 54(6): 110-117 https://doi.org/10.3901/JME.2018.06.110

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