Effect of Sputtering Power on the Mechanical Properties of Ti Film Based on the Nano Indentation Method and Nano Impact Method

JIN Qiaoling, WANG Haidou, LI Guolu, ZHANG Jianjun, LIU Jinna

Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (2) : 117-124.

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Journal of Mechanical Engineering ›› 2018, Vol. 54 ›› Issue (2) : 117-124. DOI: 10.3901/JME.2018.02.117

Effect of Sputtering Power on the Mechanical Properties of Ti Film Based on the Nano Indentation Method and Nano Impact Method

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 54(2): 117-124 https://doi.org/10.3901/JME.2018.02.117

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