Solid Catalysts Based on Fenton Reaction for SiC Wafer in Chemical Mechanical Polishing

XU Shaoping, LU Jiabin, YAN Qiusheng, SONG Tao, PAN Jisheng

Journal of Mechanical Engineering ›› 2017, Vol. 53 ›› Issue (21) : 167-173.

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Journal of Mechanical Engineering ›› 2017, Vol. 53 ›› Issue (21) : 167-173. DOI: 10.3901/JME.2017.21.167

Solid Catalysts Based on Fenton Reaction for SiC Wafer in Chemical Mechanical Polishing

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 53(21): 167-173 https://doi.org/10.3901/JME.2017.21.167

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