Effects of Translational Movement on Surface Planarity in Magnetorheological Planarization Process

WANG Yongqiang, YIN Shaohui, LI Yepeng, HU Tian, CHEN Fengjun

Journal of Mechanical Engineering ›› 2017, Vol. 53 ›› Issue (1) : 206-212.

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Journal of Mechanical Engineering ›› 2017, Vol. 53 ›› Issue (1) : 206-212. DOI: 10.3901/JME.2017.01.206

Effects of Translational Movement on Surface Planarity in Magnetorheological Planarization Process

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 53(1): 206-212 https://doi.org/10.3901/JME.2017.01.206

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