Surface Roughness Prediction of SiC Monocrystalline Cut by Diamond Wire-saw Excited by Transverse Ultrasonic Vibration

LI Lun, LI Shujuan, TANG Aofei, LI Yan, YANG Mingshun

Journal of Mechanical Engineering ›› 2016, Vol. 52 ›› Issue (19) : 204-212.

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Journal of Mechanical Engineering ›› 2016, Vol. 52 ›› Issue (19) : 204-212. DOI: 10.3901/JME.2016.19.204

Surface Roughness Prediction of SiC Monocrystalline Cut by Diamond Wire-saw Excited by Transverse Ultrasonic Vibration

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 52(19): 204-212 https://doi.org/10.3901/JME.2016.19.204

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