Rapid Detection on the Thickness of Sub-surface Damage Layer of Silicon

XU Le, GUO Jian, YU Bingjun, QIAN Linmao

Journal of Mechanical Engineering ›› 2016, Vol. 52 ›› Issue (11) : 108-114.

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Journal of Mechanical Engineering ›› 2016, Vol. 52 ›› Issue (11) : 108-114. DOI: 10.3901/JME.2016.11.108

Rapid Detection on the Thickness of Sub-surface Damage Layer of Silicon

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 52(11): 108-114 https://doi.org/10.3901/JME.2016.11.108

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