Research on the Process Model for Focused Ion Beam Sputtering Etching Micro/Nanofabrication

LI Yuan, XING Yan, QIU Xiaoli

Journal of Mechanical Engineering ›› 2016, Vol. 52 ›› Issue (5) : 101-106.

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Journal of Mechanical Engineering ›› 2016, Vol. 52 ›› Issue (5) : 101-106. DOI: 10.3901/JME.2016.05.101

Research on the Process Model for Focused Ion Beam Sputtering Etching Micro/Nanofabrication

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 52(5): 101-106 https://doi.org/10.3901/JME.2016.05.101

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